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		<div   id="akgwmmn"   class="title_content textSet">設備特征</div>
		<div   id="8qgghhc"   class="line_t lineshapeSet"></div>
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<script class="editor-view-extend">
    </script><div>大尺寸范圍：可制備小至單原子，大至直徑大于10nm團簇；
</div><div>窄尺寸分布：無質量選擇條件下，團簇直徑分布小于±10%；
</div><div>廣材料種類：可制備大部分金屬，部分半導體、絕緣體團簇；
</div><div>原子氣產(chǎn)生：可配備蒸發(fā)源、磁控濺射、火花燒蝕等產(chǎn)生源；
</div><div>氣相冷凝腔：液氮、水冷；氣壓、溫度可控；冷凝距離可調；
</div><div>多沉積形式；兼容金屬、玻璃、陶瓷、聚合物等襯底或粉末；
</div><div>高束流流量：典型金屬團簇束流>1nA；其他團簇束流>100pA；
</div><div>穩(wěn)沉積能量：精確可調，可實現(xiàn)團簇軟著陸沉積、高能撞擊；
</div><div>計算機控制：功能軟件控制，運行日志存檔，實驗參數(shù)調用；</div>                </div>
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    </script><div>大尺寸范圍：</div><div>窄尺寸分布：</div><div>廣材料種類：</div><div>原子氣產(chǎn)生：</div><div>氣相冷凝腔：</div><div>多沉積形式；</div><div>高束流流量：</div><div>穩(wěn)沉積能量：</div><div>計算機控制：</div>                </div>
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		<div   id="cnn8ghc"   class="title_content textSet">設備功能</div>
		<div   id="3g8zpa3"   class="line_t lineshapeSet"></div>
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<script class="editor-view-extend">
    </script><div>深圳擴維原子科技有限公司開發(fā)的原子精確團簇束流系統(tǒng)，通過“原子產(chǎn)生+氣相凝聚+質譜分選”的自下而上原子級制造技術，在氣相中合成納米團簇。基于近10年的深入研究與超過15臺（套）設備的技術迭代，解決了高效率原子級精確操控的科學問題與團簇束流流量即團簇材料產(chǎn)能放大的技術問題，可以實現(xiàn)普適的元素精確、原子數(shù)精確以及原子排列結構精確團簇材料的高速率制造，兼容襯底、粉末、溶液等沉積方式，并可以根據(jù)您的要求進行定制。</div>                </div>
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	<div   id="dl8n3c3"   class="container_r">
		<div   id="xpgbhdn"   class="title_content textSet">附加功能</div>
		<div   id="k2rh38f"   class="line_t lineshapeSet"></div>
		<div   id="w3ofwbs"   class="line_b lineshapeSet"></div>
	</div>
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                        <div   class="vxdto8h"   id="text_style_01_1733825208775" class="view style_01 text  lockHeightView "  data-wow-duration='0s' data-wow-delay='0s' data-wow-offset='0' data-wow-iteration='1'>
                <div names="text" class="view_contents" >
<script class="editor-view-extend">
    </script><div>掃描沉積系統(tǒng)：</div><div>粉末沉積系統(tǒng)：</div><div>多元原子產(chǎn)生：</div><div>復合材料沉積：</div><div>超高質量分辨：</div><div>原子結構選擇：</div><div>原子捕獲添加：</div><div>定制超高真空：</div>                </div>
            </div>
                        <div   class="ifqb3uk"   id="text_style_01_1736232694050" class="view style_01 text  lockHeightView "  data-wow-duration='0s' data-wow-delay='0s' data-wow-offset='0' data-wow-iteration='1'>
                <div names="text" class="view_contents" >
<script class="editor-view-extend">
    </script><div>可制備小至單原子，大至直徑大于10nm團簇；
</div><div>無質量選擇條件下，團簇直徑分布小于±10%；
</div><div>可制備大部分金屬，部分半導體、絕緣體團簇；
</div><div>可配備蒸發(fā)源、磁控濺射、火花燒蝕等產(chǎn)生源；
</div><div>液氮、水冷；氣壓、溫度可控；冷凝距離可調；
</div><div>兼容金屬、玻璃、陶瓷、聚合物等襯底或粉末；
</div><div>典型金屬團簇束流>1nA；其他團簇束流>100pA；
</div><div>精確可調，可實現(xiàn)團簇軟著陸沉積、高能撞擊；
</div><div>功能軟件控制，運行日志存檔，實驗參數(shù)調用；</div>                </div>
            </div>
                        <div   class="ubbwhhx"   id="text_style_01_1736232931547" class="view style_01 text  lockHeightView "  data-wow-duration='0s' data-wow-delay='0s' data-wow-offset='0' data-wow-iteration='1'>
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<script class="editor-view-extend">
    </script><div>真空內(nèi)厘米級多軸移動平臺，實現(xiàn)團簇的掃描沉積。
</div><div>通過振動、流化等分散方式，實現(xiàn)團簇的粉末沉積。
</div><div>集成2~3個磁控陰極，濺射多個靶材以形成合金團簇。
</div><div>沉積腔配備蒸發(fā)源共沉積原子/薄膜，形成復合材料。
</div><div>可定制反射式飛行時間質譜，串聯(lián)三重四極桿質譜。
</div><div>可定制斯特恩-蓋拉赫，利用磁場梯度實現(xiàn)結構選擇。
</div><div>可定制離子阱+蒸發(fā)源，實現(xiàn)團簇束流在線捕獲原子。
</div><div>整體設備系統(tǒng)可以定制達到超高真空標準（可烘烤）。</div>                </div>
            </div>
                            </div>
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                        <div   class="qyjpagg"   id="titleText_style_08_1722230120541" class="view style_08 titleText  lockHeightView "  data-wow-duration='0s' data-wow-delay='0s' data-wow-offset='0' data-wow-iteration='1'>
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<script class="editor-view-extend">
    </script><div   id="lekkohi"   class="titleStyle_8 modSet">
	<div   id="ldt8xy3"   class="view_cont">
		<div   id="goj38f3"   class="title_top_view">
			<div   id="3m2lwn3"   class="line lineleft lineshapeSet"></div>
			<div   id="3tpvlqh"   class="circle circleleft circledotSet"></div>
			<div   id="cagmstt"   class="titletop bigtitsSet">原子精確團簇束流設備</div>
			<div   id="kci8ct3"   class="circle circleright circledotSet"></div>
			<div   id="jllr3ri"   class="line lineright lineshapeSet"></div>
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			<div   id="s3wnit3"   class="titlebottom minititsSet">CREATOM</div>
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                        <div   class="oghyykf"   id="text_style_01_1739786331176" class="view style_01 text  lockHeightView "  data-wow-duration='0s' data-wow-delay='0s' data-wow-offset='0' data-wow-iteration='1'>
                <div names="text" class="view_contents" >
<script class="editor-view-extend">
    </script><div>真空內(nèi)厘米級多軸移動平臺，實現(xiàn)團簇的掃描沉積。
</div><div>通過振動、流化等分散方式，實現(xiàn)團簇的粉末沉積。
</div><div>集成2~3個磁控陰極，濺射多個靶材以形成合金團簇。
</div><div>沉積腔配備蒸發(fā)源共沉積原子/薄膜，形成復合材料。
</div><div>可定制反射式飛行時間質譜，串聯(lián)三重四極桿質譜。
</div><div>可定制斯特恩-蓋拉赫，利用磁場梯度實現(xiàn)結構選擇。
</div><div>可定制離子阱+蒸發(fā)源，實現(xiàn)團簇束流在線捕獲原子。
</div><div>整體設備系統(tǒng)可以定制達到超高真空標準（可烘烤）。</div>                </div>
            </div>
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